Product Portfolio
Semiconductor End to End Device Manufacturing Tools
Photo-Lithography Tools
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Mask Aligner and UV Exposure tool
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Maskless Lithography
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Spin & Spray Coating & developing System.
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Single Wafer Cleaning systems
Vacuum Deposition, Etching and Furnace Tools
1. Sputtering System
2. Atomic Layer Deposition (ALD)
3. Electron Beam Evaporation System
4. Deep Reactive Ion Etching System (DRIE)
5. Megasonic Cleaners
6. Chemical Vapor Deposition (CVD)
7. Rapid Thermal Annealing System (RTA/RTP)
8. LPCVD/ Oxidization/Diffusion Furnaces
9. Drying and Firing Furnace
10. Plasma Ion Implantation
11. Wet Etching/Wet Bench
12. Plasma cleaning and Ashing System
Assembly & Packaging Tools
1. Grinding and Polishing
2. Saw Dicing Machine
3. Wire bonder
4. Die bonder
5. Flip Chip Bonder
6. UV Tape mounter
7. BGA Rework Station
8. High Precision Laser Micromachining System
9. Screen Printer